CARBON NITRIDE FILMS SYNTHESIZED BY NH3-ION-BEAM-ASSISTED DEPOSITION

被引：88

作者：

SONG, HW

CUI, FZ

HE, XM

LI, WZ

LI, HD

机构：

[1] Dept. of Mater. Sci. and Eng., Tsinghua Univ., Beijing

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 1994年 / 6卷 / 31期

关键词：

D O I：

10.1088/0953-8984/6/31/011

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Carbon nitride thin films have been prepared by NH3-ion-beam-assisted deposition with bombardment energies of 200-800 eV at room temperature. These films have been characterized by transmission electron microscopy, Auger electron spectroscopy and x-ray photoelectron spectroscopy for chemical analysis. It was found that the structure of the films varied with the bombardment energy. In the case of 400 eV bombardment, the tiny crystallites immersed on an amorphous matrix were identified to be beta-C3N4. X-ray photoelectron spectroscopy indicated that some carbon atoms and nitrogen atoms form unpolarized covalent bonds in these films.

引用

页码：6125 / 6129

页数：5

共 13 条

[1]

CUI FZ, 1991, CHINESE PHYS LETT, V8, P525, DOI 10.1088/0256-307X/8/10/009

[2] DETAILED SURFACE AND GAS-PHASE CHEMICAL-KINETICS OF DIAMOND DEPOSITION [J].