LIGHT-INDUCED EFFECT OF A-SI FILMS FABRICATED USING THE SUPER CHAMBER

被引：6

作者：

OHNISHI, M ^{[1
]}

TSUDA, S ^{[1
]}

TAKAHAMA, T ^{[1
]}

ISOMURA, M ^{[1
]}

NAKASHIMA, Y ^{[1
]}

NAKAMURA, N ^{[1
]}

NAKANO, S ^{[1
]}

YAZAKI, T ^{[1
]}

KUWANO, Y ^{[1
]}

机构：

[1] SANYO ELECT CO LTD,RES CTR,HIRAKATA CITY,OSAKA 573,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 09期

关键词：

D O I：

10.1143/JJAP.26.1408

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1408 / 1412

页数：5

共 12 条

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[3]

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[4]

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[5]

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[9] LIGHT-INDUCED METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON - A SYSTEMATIC STUDY [J].

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[10] PHOTO-CREATION OF DEFECTS IN PLASMA-DEPOSITED A-SI-H [J].

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