X-RAY-INDUCED REACTIONS AND RESIST FEATURES OF POLYDIBUTYLGERMANE

[1] ON THE THERMAL INTERCONVERSION OF MATRIX-ISOLATED DIMETHYLSILYLENE AND 2SILAPROPENE - THEIR REACTIONS WITH OXYGEN ATOM DONORS [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1983, 105 (19) : 6176 - 6177

[2] THE IMPORTANCE OF ORGANOSILANE POLYMER PHOTOOXIDATION IN RESIST PATTERN FABRICATION [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1987, 33 (08) : 2787 - 2793

[3] STEP-AND-REPEAT X-RAY PHOTO HYBRID LITHOGRAPHY FOR 0.3-MU-M MOS DEVICES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (04) : 759 - 764

[4] HAYASAKA T, 1986, J VAC SCI TECHNOL B, V3, P1581

[5] SOLUBLE POLYSILANES - AN INTERESTING NEW CLASS OF RADIATION SENSITIVE MATERIALS [J]. POLYMER ENGINEERING AND SCIENCE, 1986, 26 (16) : 1129 - 1134

[6] ORGANOGERMANE HOMOPOLYMERS AND COPOLYMERS WITH ORGANOSILANES [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1985, 23 (08) : 2099 - 2107

[7] ORGANOSILANE HIGH POLYMERS - ELECTRONIC-SPECTRA AND PHOTODEGRADATION [J]. JOURNAL OF POLYMER SCIENCE PART C-POLYMER LETTERS, 1983, 21 (10) : 823 - 829

[8] POLYSILANE HIGH POLYMERS - MECHANISM OF PHOTODEGRADATION [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1985, 107 (09) : 2737 - 2742

[9] THE POLYSILANE HIGH POLYMERS [J]. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1986, 300 (1-2) : 327 - 346

[10] ZEIGLER JM, 1985, P SOC PHOTO-OPT INST, V539, P166, DOI 10.1117/12.947830

[1] ON THE THERMAL INTERCONVERSION OF MATRIX-ISOLATED DIMETHYLSILYLENE AND 2SILAPROPENE - THEIR REACTIONS WITH OXYGEN ATOM DONORS [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1983, 105 (19) : 6176 - 6177

[2] THE IMPORTANCE OF ORGANOSILANE POLYMER PHOTOOXIDATION IN RESIST PATTERN FABRICATION [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1987, 33 (08) : 2787 - 2793

[3] STEP-AND-REPEAT X-RAY PHOTO HYBRID LITHOGRAPHY FOR 0.3-MU-M MOS DEVICES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (04) : 759 - 764

[4] HAYASAKA T, 1986, J VAC SCI TECHNOL B, V3, P1581

[5] SOLUBLE POLYSILANES - AN INTERESTING NEW CLASS OF RADIATION SENSITIVE MATERIALS [J]. POLYMER ENGINEERING AND SCIENCE, 1986, 26 (16) : 1129 - 1134

[6] ORGANOGERMANE HOMOPOLYMERS AND COPOLYMERS WITH ORGANOSILANES [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1985, 23 (08) : 2099 - 2107

[7] ORGANOSILANE HIGH POLYMERS - ELECTRONIC-SPECTRA AND PHOTODEGRADATION [J]. JOURNAL OF POLYMER SCIENCE PART C-POLYMER LETTERS, 1983, 21 (10) : 823 - 829

[8] POLYSILANE HIGH POLYMERS - MECHANISM OF PHOTODEGRADATION [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1985, 107 (09) : 2737 - 2742

[9] THE POLYSILANE HIGH POLYMERS [J]. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1986, 300 (1-2) : 327 - 346

[10] ZEIGLER JM, 1985, P SOC PHOTO-OPT INST, V539, P166, DOI 10.1117/12.947830