DYNAMIC MONTE-CARLO SIMULATION OF COMPOSITIONAL CHANGE AND ATOMIC REDISTRIBUTION IN MULTICOMPONENT TARGETS UNDER ION-BOMBARDMENT

被引：27

作者：

CHAKAROV, IR ^{[1
]}

TODOROV, SS ^{[1
]}

KARPUZOV, DS ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST ELECTR,BLVD TRAKIA 72,BU-1784 SOFIA,BULGARIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 69卷 / 2-3期

关键词：

D O I：

10.1016/0168-583X(92)96010-V

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A dynamic Monte Carlo program developed for the simulation of high-fluence effects in ion bombardment of multicomponent targets is described. The program includes a code for modelling the chemically guided motion of the slowed down primaries and recoils. Examples of the application of the simulation program to Ar+ sputtering of CdHgTe and SiO2, O+ implantation into Si and Ar+ sputtering of Al/Si with concurrent adsorption of O2 are presented and compared with experimental results.

引用

页码：193 / 199

页数：7

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