SPUTTERING THEORY

被引：43

作者：

FALCONE, G

机构：

[1] CISM,GNSM UNIT,COSENZA,ITALY

[2] INFM COSENZA,COSENZA,ITALY

来源：

RIVISTA DEL NUOVO CIMENTO | 1990年 / 13卷 / 01期

关键词：

D O I：

10.1007/BF02742981

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

[No abstract available]

引用

页码：1 / 52

页数：52

共 89 条

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[2] Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145
[3] SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION
ANDERSEN, HH
STENUM, B
SORENSEN, T
WHITLOW, HJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 487 - 494
[4] BEHRISH R, 1983, SPUTTERING ION BOMBA, V2
[5] BEHRISH R, 1981, SPUTTERING ION BOMBA, V1
[6] BIERSACK JP, 1984, APPL PHYS A, V34, P78
[7] BOHR N, 1948, MAT FYS MEDD K DAN V, V18
[8] UNIFIED SPUTTERING THEORY
BRANDT, W
LAUBERT, R
[J]. NUCLEAR INSTRUMENTS & METHODS, 1967, 47 (02): : 201 - &
[9] CARTER G, 1981, SPUTTERING ION BOMBA, V1
[10] CLAUSSEN C, 1982, THESIS U ODENSE