DETERMINATION OF THE OPTICAL-CONSTANTS OF METALS AND SEMICONDUCTORS BY COMBINING ELLIPSOMETRY WITH ELECTRON-SPECTROSCOPY MICROSCOPY AND X-RAY SPECULAR REFLECTION ANALYSIS

被引：7

作者：

GERGELY, G ^{[1
]}

BODO, Z ^{[1
]}

CROCE, P ^{[1
]}

机构：

[1] CTR UNIV ORSAY,INST OPT THEOR & APPL,F-91406 ORSAY,FRANCE

来源：

SURFACE SCIENCE | 1988年 / 200卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(88)90560-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：527 / 535

页数：9

共 24 条

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[2]

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[3]

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[5] ELLIPSOMETRIC AND X-RAY SPECULAR REFLECTION STUDIES ON NATURALLY GROWN OVERLAYERS ON ALUMINUM THIN-FILMS [J].

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[6]

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[7]

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[8] SOME NEW POSSIBILITIES IN NONDESTRUCTIVE DEPTH PROFILING USING SECONDARY-EMISSION SPECTROSCOPY - REELS AND EPES [J].

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[9]

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[10] THE INTERACTION OF OXYGEN WITH ALUMINUM - MAINLY ELLIPSOMETRIC ASPECTS [J].

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