METASTABLE ATOM ELECTRON-SPECTROSCOPY OF CLEAN AND OXIDIZED SI(111)-7X7 SURFACES - OBSERVATION OF THE SEMICONDUCTOR INSULATOR TRANSITION

被引：35

作者：

ISHII, H

MASUDA, S

HARADA, Y

机构：

[1] Department of Chemistry, College of Arts and Sciences, The University of Tokyo, Meguro, Tokyo, 153, Komaba

来源：

SURFACE SCIENCE | 1990年 / 239卷 / 03期

关键词：

D O I：

10.1016/0039-6028(90)90224-V

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The electron emission spectra resulting from thermal collisions of He * (2(3)S) metastable atoms with a Si(111)-7 X 7 surface were measured. Upon the oxidation of the surface, the deexcitation process of the metastable atom is found to change from resonance ionization followed by Auger neutralization to Penning ionization owing to the semiconductor-insulator transition of the surface. From comparison with the photoemission spectra, the electronic states of the outermost oxide layer are discussed.

引用

页码：222 / 226

页数：5

共 13 条

[1] INTERACTION OF NI WITH SIOX OR SIO2 FORMED ON SI(111) AND CO ADSORPTION INHIBITION IN NI/SIOX/N-SI(111) STUDIED BY XPS AND AES [J].