STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF SRTIO3 THIN-FILMS PREPARED BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

被引:60
作者
YAMAGUCHI, H [1 ]
LESAICHERRE, PY [1 ]
SAKUMA, T [1 ]
MIYASAKA, Y [1 ]
ISHITANI, A [1 ]
YOSHIDA, M [1 ]
机构
[1] NEC CORP LTD,ULSI DEVICE DEV LABS,SAGAMIHARA 229,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9B期
关键词
FERROELECTRIC THIN FILM; MOCVD; SRTIO3; DIELECTRIC CONSTANT; CAPACITOR;
D O I
10.1143/JJAP.32.4069
中图分类号
O59 [应用物理学];
学科分类号
摘要
SrTiO3 thin films were prepared on Si and Pt/TaO(x)/Si substrates by Sr(DPM)2/Ti(i-OC3H7)4/O2/Ar chemical vapor deposition (CVD), using a simple vaporizing-and-transport source delivery system. A thickness uniformity of +/-5.6% and a composition uniformity of +/-2.7% were obtained. The dielectric constant was 210 for 110 nm thick SrTiO3 films (Sr/(Sr+Ti) = 0.5) annealed at 600-degrees-C for 2 hours. An SiO2 equivalent thickness of 1.1 nm was obtained for 40 nm thick SrTiO3 films, and leakage current densities were 6 x 10(-8) angstrom/cm2 at 1.0 V and 5 x 10(-7) A/cm2 at 1.65 V. The structural and electrical properties were affected by the film composition.
引用
收藏
页码:4069 / 4073
页数:5
相关论文
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