CORRELATION BETWEEN X-RAY-DIFFRACTION PATTERNS AND STRAIN DISTRIBUTION INSIDE GAINP/GAAS SUPERLATTICES

Strong correlation between x-ray diffraction characteristics and strain distribution inside GaInP/GaAs superlattices has been reported. It is found that the symmetry of (002) diffraction patterns can be used to evaluate the interface strain status. A sample with no interfacial strains has a symmetric (002) diffraction pattern and weak (004) diffraction pattern. It is also demonstrated that strain distribution in superlattices can be readily estimated qualitatively by analyzing x-ray diffraction patterns. © 1994 American Institute of Physics.