COMPOSITION AND LATTICE-MISMATCH MEASUREMENT OF THIN SEMICONDUCTOR LAYERS BY X-RAY-DIFFRACTION

被引：200

作者：

FEWSTER, PF

CURLING, CJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 10期

关键词：

D O I：

10.1063/1.339133

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4154 / 4158

页数：5

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