COMPOSITION AND LATTICE-MISMATCH MEASUREMENT OF THIN SEMICONDUCTOR LAYERS BY X-RAY-DIFFRACTION

被引:200
作者
FEWSTER, PF
CURLING, CJ
机构
关键词
D O I
10.1063/1.339133
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4154 / 4158
页数:5
相关论文
共 12 条
[1]   X-RAY DOUBLE-CRYSTAL DIFFRACTOMETRY OF GA1-XALXAS EPITAXIAL LAYERS [J].
BARTELS, WJ ;
NIJMAN, W .
JOURNAL OF CRYSTAL GROWTH, 1978, 44 (05) :518-525
[2]   DETERMINATION OF ALUMINUM BY ATOMIC-ABSORPTION SPECTROMETRY AND X-RAY-DIFFRACTION IN GA1-XALXAS EPITAXIAL LAYERS GROWN BY MOLECULAR-BEAM EPITAXY [J].
BAUDET, M ;
REGRENY, O ;
DUPAS, G ;
AUVRAY, P ;
GAUNEAU, M ;
REGRENY, A ;
TALALAEFF, G .
MATERIALS RESEARCH BULLETIN, 1983, 18 (02) :123-133
[3]  
BLOOD P, 1986, SEMICOND SCI TECH, V1, P1
[4]   DOUBLE-CRYSTAL SPECTROMETER MEASUREMENTS OF LATTICE-PARAMETERS AND X-RAY TOPOGRAPHY ON HETEROJUNCTIONS GAAS-ALXGA1-XAS [J].
ESTOP, E ;
IZRAEL, A ;
SAUVAGE, M .
ACTA CRYSTALLOGRAPHICA SECTION A, 1976, 32 (JUL1) :627-&
[5]  
FEWSTER PF, 1986, PHILIPS J RES, V41, P268
[6]  
FEWSTER PF, 1987, NATO ADV RES WORKSHO
[7]  
HALLIWELL MAG, 1983, I PHYS C SER, V67, P365
[8]   A DYNAMICAL THEORY OF DIFFRACTION FOR A DISTORTED CRYSTAL [J].
TAKAGI, S .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1969, 26 (05) :1239-&
[9]   DYNAMICAL THEORY OF DIFFRACTION APPLICABLE TO CRYSTALS WITH ANY KIND OF SMALL DISTORTION [J].
TAKAGI, S .
ACTA CRYSTALLOGRAPHICA, 1962, 15 (DEC) :1311-&
[10]  
TANNER BK, 1986, ADV XRAY ANAL, V29, P337