DEPOSITION METHODS FOR DIELECTRIC FILMS AND THEIR ELECTRICAL-PROPERTIES

被引：4

作者：

CAMPBELL, DS ^{[1
]}

机构：

[1] LOUGHBOROUGH UNIV TECHNOL, DEPT ELECTR & ELECT ENGN, LOUGHBOROUGH LE11 3TU, LEICESTERSHIRE, ENGLAND

来源：

关键词：

D O I：

10.1016/0042-207X(77)90001-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：213 / 225

页数：13

共 52 条

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CAMPBELL, DS ;

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[9]

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[10]

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