ELECTRON-MICROSCOPY STUDY OF ARSENIC SEGREGATION IN SILICON

被引:4
作者
KOMEM, Y [1 ]
机构
[1] TECHNION,DEPT MAT ENGN,HAIFA 3200,ISRAEL
来源
ACTA METALLURGICA | 1977年 / 25卷 / 07期
关键词
D O I
10.1016/0001-6160(77)90097-9
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
引用
收藏
页码:809 / 814
页数:6
相关论文
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