MONTE-CARLO SIMULATION OF ION-TRANSPORT THROUGH RF GLOW-DISCHARGE SHEATHS

被引：124

作者：

THOMPSON, BE ^{[1
]}

SAWIN, HH ^{[1
]}

FISHER, DA ^{[1
]}

机构：

[1] DUPONT CO,DEPT CENT RES & DEV,WILMINGTON,DE 19898

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.341062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2241 / 2251

页数：11

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