OPTICAL-ABSORPTION AS A CONTROL TEST FOR PLASMA SILICON-NITRIDE DEPOSITION

[1] OPTICAL-PROPERTIES, BAND-GAP, AND SURFACE-ROUGHNESS OF SI3N4 [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 39 (02): : 411 - 418

[2] HYDROGENATED AMORPHOUS SILICON - SOLAR-CELL MATERIAL [J]. THIN SOLID FILMS, 1977, 45 (01) : 43 - 46

[3] COLBY JW, 1971, 6TH P NAT C EL PROB

[4] Philipp H. R., 1972, J NONCRYST SOLIDS, V8, P627

[5] OPTICAL CONSTANTS OF SILICON IN THE REGION 1 TO 10 EV [J]. PHYSICAL REVIEW, 1960, 120 (01): : 37 - 38

[6] OPTICAL PROPERTIES OF NON-CRYSTALLINE SI, SIO, SIOX AND SIO2 [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1971, 32 (08) : 1935 - &

[7] OPTICAL PROPERTIES OF SILICON-NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (02) : 295 - 300

[8] RAND MJ, UNPUBLISHED

[9] Reinberg A. R., 1973, US patent, Patent No. [3,757,733, 3757733]

[10] REINBERG AR, 1974, MAY EL SOC M SAN FRA

[1] OPTICAL-PROPERTIES, BAND-GAP, AND SURFACE-ROUGHNESS OF SI3N4 [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 39 (02): : 411 - 418

[2] HYDROGENATED AMORPHOUS SILICON - SOLAR-CELL MATERIAL [J]. THIN SOLID FILMS, 1977, 45 (01) : 43 - 46

[3] COLBY JW, 1971, 6TH P NAT C EL PROB

[4] Philipp H. R., 1972, J NONCRYST SOLIDS, V8, P627

[5] OPTICAL CONSTANTS OF SILICON IN THE REGION 1 TO 10 EV [J]. PHYSICAL REVIEW, 1960, 120 (01): : 37 - 38

[6] OPTICAL PROPERTIES OF NON-CRYSTALLINE SI, SIO, SIOX AND SIO2 [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1971, 32 (08) : 1935 - &

[7] OPTICAL PROPERTIES OF SILICON-NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (02) : 295 - 300

[8] RAND MJ, UNPUBLISHED

[9] Reinberg A. R., 1973, US patent, Patent No. [3,757,733, 3757733]

[10] REINBERG AR, 1974, MAY EL SOC M SAN FRA