CAPACITANCE AND CONDUCTION PROPERTIES OF SEMI-INSULATING POLYCRYSTALLINE SILICON FILMS

被引：4

作者：

BLACK, RD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.341021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2458 / 2460

页数：3

共 11 条

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