INTERFACE EFFECTS OF SIPOS PASSIVATION

被引:12
作者
TONG, DW [1 ]
BENJAMIN, JL [1 ]
VANDELL, WR [1 ]
机构
[1] GE,CTR POWER SEMICOND TECHNOL,SYRACUSE,NY 13221
关键词
D O I
10.1109/T-ED.1986.22568
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:779 / 787
页数:9
相关论文
共 15 条
[1]   AES AND PES STUDIES OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) FILMS [J].
ADACHI, T ;
HELMS, CR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (07) :1617-1621
[2]   PREPARATION AND SOME PROPERTIES OF CHEMICALLY VAPOR-DEPOSITED SI-RICH SIO2 AND SI3N4 FILMS [J].
DONG, D ;
IRENE, EA ;
YOUNG, DR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (05) :819-823
[3]  
GHANDI SK, 1977, SEMICONDUCTOR POWER, P63
[4]   CRYSTALLOGRAPHIC STUDY OF SEMI-INSULATING POLYCRYSTALLINE SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS [J].
HAMASAKI, M ;
ADACHI, T ;
WAKAYAMA, S ;
KIKUCHI, M .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :3987-3992
[5]   ELECTRONIC PROPERTIES OF SEMI-INSULATING POLYCRYSTALLINE-SILICON (SIPOS) DOPED WITH OXYGEN-ATOMS [J].
HAMASAKI, M ;
ADACHI, T ;
WAKAYAMA, S ;
KIKUCHI, M .
SOLID STATE COMMUNICATIONS, 1977, 21 (06) :591-593
[6]   FAST CAPACITANCE TRANSIENT APPARATUS - APPLICATION TO ZNO AND O CENTERS IN GAP PARANORMAL JUNCTIONS [J].
LANG, DV .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3014-3022
[7]   HIGHLY RELIABLE HIGH-VOLTAGE TRANSISTORS BY USE OF SIPOS PROCESS [J].
MATSUSHITA, T ;
AOKI, T ;
OHTSU, T ;
YAMOTO, H ;
HAYASHI, H ;
OKAYAMA, M ;
KAWANA, Y .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (08) :826-830
[8]   SI-SIO2 INTERFACE - ELECTRICAL PROPERTIES AS DETERMINED BY METAL-INSULATOR-SILICON CONDUCTANCE TECHNIQUE [J].
NICOLLIA.EH ;
GOETZBER.A .
BELL SYSTEM TECHNICAL JOURNAL, 1967, 46 (06) :1055-+
[9]  
Sze S. M., 1981, PHYSICS SEMICONDUCTO, P369
[10]   CARRIER TRANSPORT IN OXYGEN-RICH POLYCRYSTALLINE-SILICON FILMS [J].
TARNG, ML .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :4069-4076