REGROWTH OF AMORPHOUS FILMS

被引:56
作者
LAU, SS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期
关键词
D O I
10.1116/1.569824
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1656 / 1661
页数:6
相关论文
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    GALLAGHER, TJ
    MAYER, JW
    SIGMON, TW
    [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4234 - 4240
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  • [7] CULLIS AG, 1976, 6TH P EUR C EL MICR, V1, P192
  • [8] INFLUENCE OF O-16, C-12, N-14, AND NOBLE-GASES ON CRYSTALLIZATION OF AMORPHOUS SI LAYERS
    KENNEDY, EF
    CSEPREGI, L
    MAYER, JW
    SIGMON, TW
    [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4241 - 4246
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