IMPURITY DIFFUSION OF AL IN NI SINGLE-CRYSTALS STUDIED BY SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：89

作者：

GUST, W

HINTZ, MB

LODDING, A

ODELIUS, H

PREDEL, B

机构：

[1] UNIV STUTTGART,INST MET KUNDE,D-7000 STUTTGART 80,FED REP GER

[2] CHALMERS TEKNISKA HOGSKOLA,MATERIALCENTRUM,S-41296 GOTHENBURG,SWEDEN

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1981年 / 64卷 / 01期

关键词：

D O I：

10.1002/pssa.2210640120

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：187 / 194

页数：8

共 17 条

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ACTA METALLURGICA, 1980, 28 (09) :1235-1244

[5]

GUST W, UNPUBLISHED

[6]

GUST W, PHIL MAG

[7] SECONDARY-ION MASS-SPECTROMETRY AND ITS USE IN DEPTH PROFILING [J].

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[8]

LODDING A, 1977, NEW MATERIALS ADV TE, P277

[9]

LODDING A, 1980, ADV MASS SPECTROM, V8, P471

[10]

MCHUGH JA, 1975, SECONDARY ION MASS S, P179

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