SIMULTANEOUS DETECTION OF LIGHT-ELEMENTS BY ERDA WITH GAS-IONIZATION SI DELTA-E-E DETECTOR TELESCOPE

被引：30

作者：

AVASTHI, DK

KABIRAJ, D

BHAGWAT, A

MEHTA, GK

VANKAR, VD

OGALE, SB

机构：

[1] INDIAN INST TECHNOL,DEPT PHYS,NEW DELHI 110016,INDIA

[2] UNIV POONA,DEPT PHYS,POONA 411007,MAHARASHTRA,INDIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 93卷 / 04期

关键词：

D O I：

10.1016/0168-583X(94)95637-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Elastic Recoil Detection Analysis (ERDA) using DELTAE-E telescope with gaseous DELTAE detector is carried out for the first time for simultaneous detection of H alongwith other light elements C, N, and O in Diamondlike Carbon (DLC) films. The experimental data indicated the detection limit of 0.002 at.% for H and 0.006 at.% for N and O with 10% statistical inaccuracy.

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收藏

页码：480 / 484

页数：5

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