ARSENIC SOUUCE VAPOR PRESSURE KINETICS AND CAPSULE DIFFUSION

[1] DIFFUSION MODEL FOR ARSENIC IN SILICON [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1971, 15 (06) : 472 - &

[2] DUFFY MC, 1966, SEMICOND PROD SOLID, V9, P27

[3] KLEMM VW, 1941, Z ANORG ALLG CHEM, V247, P211

[4] SOLID-VAPOR EQUILIBRIA FOR THE COMPOUNDS CD3AS2 AND CDAS2 [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (02) : 266 - 269

[5] LYONS VJ, 1970, Patent No. 2012459

[6] SANDHU JS, 1968, APR NORTHW U MAT SCI

[7] STULL DR, 1956, THERMODYNAMIC PROPER, P233

[8] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233

[1] DIFFUSION MODEL FOR ARSENIC IN SILICON [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1971, 15 (06) : 472 - &

[2] DUFFY MC, 1966, SEMICOND PROD SOLID, V9, P27

[3] KLEMM VW, 1941, Z ANORG ALLG CHEM, V247, P211

[4] SOLID-VAPOR EQUILIBRIA FOR THE COMPOUNDS CD3AS2 AND CDAS2 [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (02) : 266 - 269

[5] LYONS VJ, 1970, Patent No. 2012459

[6] SANDHU JS, 1968, APR NORTHW U MAT SCI

[7] STULL DR, 1956, THERMODYNAMIC PROPER, P233

[8] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233