INFLUENCE OF SAMPLE INCLINATION AND ROTATION DURING ION-BEAM ETCHING ON ION-ETCHED STRUCTURES

[1] BLOCHSCHMIDT E, 1926, ANN PHYSIK, V81, P999

[2] CARTER G, ION BOMBARDMENT SOLI

[3] SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1037 - 1044

[4] PENETRATION OF LATTICE DEFECTS IN COPPER AND GOLD FOILS BOMBARDED WITH 1-5 KEV ARGON IONS [J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) : 647 - &

[5] INFLUENCE OF MASK MATERIALS ON ION-ETCHED STRUCTURES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 976 - 980

[6] Grove W.R., 1852, PHILOS T R SOC, V142, P87, DOI DOI 10.1098/RSTL.1852.0008

[7] JOHN RG, 1976, PHYSICS ELECTRIC PRO

[8] JOHN RG, PHYSICS ELECTRIC PRO

[9] JUNGE HJ, 1973, AIAA, V10, P101

[10] Kaufman H. R., 1961, TND585 NASA

[1] BLOCHSCHMIDT E, 1926, ANN PHYSIK, V81, P999

[2] CARTER G, ION BOMBARDMENT SOLI

[3] SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05): : 1037 - 1044

[4] PENETRATION OF LATTICE DEFECTS IN COPPER AND GOLD FOILS BOMBARDED WITH 1-5 KEV ARGON IONS [J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) : 647 - &

[5] INFLUENCE OF MASK MATERIALS ON ION-ETCHED STRUCTURES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04): : 976 - 980

[6] Grove W.R., 1852, PHILOS T R SOC, V142, P87, DOI DOI 10.1098/RSTL.1852.0008

[7] JOHN RG, 1976, PHYSICS ELECTRIC PRO

[8] JOHN RG, PHYSICS ELECTRIC PRO

[9] JUNGE HJ, 1973, AIAA, V10, P101

[10] Kaufman H. R., 1961, TND585 NASA