OPERATIONAL TESTING OF LSI ARRAYS BY STROBOSCOPIC SCANNING ELECTRON MICROSCOPY

被引:10
作者
PLOWS, GS
NIXON, WC
机构
来源
MICROELECTRONICS AND RELIABILITY | 1971年 / 10卷 / 05期
关键词
D O I
10.1016/0026-2714(71)90207-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:317 / &
相关论文
共 13 条
  • [1] CRAWFORD RH, 1967, MOSFET CIRCUIT DESIG
  • [2] GEDES RJ, 1970, 3 P ANN SEM S
  • [3] Janssen J., 1950, PHILIPS TECH REV PHI, V12, P52
  • [4] Michels A., 1950, PHILIPS TECH REV PHI, V12, P73
  • [5] NORTON JF, 1969, P NAT ELEC C, V25
  • [6] Oatley C.W., 1966, ADV ELECTRON, V21, P181, DOI DOI 10.1016/S0065-2539(08)61010-0
  • [7] STROBOSCOPIC SCANNING ELECTRON MICROSCOPY
    PLOWS, GS
    NIXON, WC
    [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1968, 1 (06): : 595 - &
  • [8] PLOWS GS, 1969, THESIS CAMBRIDGE U
  • [9] PLOWS GS, TO BE PUBLISHED
  • [10] PROBING OF GUNN EFFECT DOMAINS WITH A SCANNING ELECTRON MICROSCOPE
    ROBINSON, GY
    WHITE, RM
    MACDONALD, NC
    [J]. APPLIED PHYSICS LETTERS, 1968, 13 (12) : 407 - +