INXGA(1-X)N/INYGA(1-Y)N SUPERLATTICES GROWN ON GAN FILMS

被引:165
作者
NAKAMURA, S
MUKAI, T
SENOH, M
NAGAHAMA, S
IWASA, N
机构
[1] Department of Research and Development, Nichia Chemical Industries, Ltd., Kaminaka, Anan, Tokushima 774
关键词
D O I
10.1063/1.354486
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-quality In0.22Ga0.78N/In0.06Ga0.94N superlattices were grown on GaN films with periods of 60 and 200 angstrom by the two-flow metalorganic chemical-vapor deposition method. The double-crystal x-ray rocking curve measurements showed satellite peaks which indicated the existence of the In0.22Ga0.78N/In0.06Ga0.94N superlattices. The quantum effects were observed through room-temperature photoluminescence (PL) measurements. These PL spectra were compared to theoretical solutions for the In0.22Ga0.78N/In0.06Ga0.94N superlattices.
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页码:3911 / 3915
页数:5
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