A GAS MIXING DEVICE FOR MOCVD

被引：11

作者：

BLAAUW, C

MINER, CJ

机构：

[1] Bell-Northern Research, P.O. Box 3511, Ottawa,ON,K1Y 4H7, Canada

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 84卷 / 02期

关键词：

This work was supported in part by the Na-tional Research Council of Canada through the Industrial Research Assistance Program;

D O I：

10.1016/0022-0248(87)90129-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：191 / 195

页数：5

相关论文

共 5 条

[1] A BIRDS-EYE-VIEW ON THE EVOLUTION OF SEMICONDUCTOR SUPERLATTICES AND QUANTUM-WELLS
ESAKI, L
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1986, 22 (09) : 1611 - 1624
[2] Hirtz J. P., 1982, GaInAsP alloy semiconductors, P61
[3] NOVEL REACTOR DESIGN FOR LARGE AREA UNIFORMITY OF ABRUPT HETEROJUNCTION STRUCTURES
LANDGREN, G
ANDERSSON, SG
ANDERSSON, JY
SAMUELSON, L
SILVERBERG, P
TOLKIEN, P
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 67 - 72
[4] PUETZ N, 1987, 1ST EUR WORKSH MOVPE
[5] AN ULTRA-FAST GAS DELIVERY SYSTEM FOR PRODUCING ABRUPT COMPOSITIONAL SWITCHING IN OMVPE
SILLMON, RS
BOTTKA, N
BUTLER, JE
GASKILL, DK
[J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 73 - 78