NOVEL REACTOR DESIGN FOR LARGE AREA UNIFORMITY OF ABRUPT HETEROJUNCTION STRUCTURES

被引:22
作者
LANDGREN, G
ANDERSSON, SG
ANDERSSON, JY
SAMUELSON, L
SILVERBERG, P
TOLKIEN, P
机构
[1] UNIV LUND,DEPT SOLID STATE PHYS,S-22100 LUND,SWEDEN
[2] ADV FURNACE TECHNOL,CAMBRIDGE CB1 3LF,ENGLAND
关键词
D O I
10.1016/0022-0248(86)90283-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:67 / 72
页数:6
相关论文
共 12 条
[1]   GROWTH OF (AL,GA)AS/GAAS HETEROSTRUCTURES FOR HEMT DEVICES [J].
ANDRE, JP ;
BRIERE, A ;
ROCCHI, M ;
RIET, M .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :445-449
[2]   GROWTH AND CHARACTERIZATION OF HIGH-QUALITY MOCVD ALGAAS/GAAS SINGLE QUANTUM WELLS [J].
DUPUIS, RD ;
MILLER, RC ;
PETROFF, PM .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :398-405
[3]   THE GROWTH OF GAAS AT REDUCED PRESSURE IN AN ORGANOMETALLIC CVD SYSTEM [J].
FIELD, RJ ;
GHANDHI, SK .
JOURNAL OF CRYSTAL GROWTH, 1984, 69 (2-3) :581-588
[4]   MOVPE GROWTH OF GA1-XALXAS-GAAS QUANTUM WELL HETEROSTRUCTURES [J].
FRIJLINK, PM ;
MALUENDA, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (09) :L574-L576
[5]   A RE-EXAMINATION OF BOUNDARY-LAYER THEORY FOR A HORIZONTAL CVD REACTOR [J].
GHANDHI, SK ;
FIELD, RJ .
JOURNAL OF CRYSTAL GROWTH, 1984, 69 (2-3) :619-622
[6]   PHOTOLUMINESCENCE OF ALGAAS GAAS QUANTUM WELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
KAWAI, H ;
KANEKO, K ;
WATANABE, N .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) :463-467
[7]   REDUCED PRESSURE MOVPE GROWTH AND CHARACTERIZATION OF GAAS/GAALAS HETEROSTRUCTURES USING A TRIETHYLGALLIUM SOURCE [J].
NORRIS, P ;
BLACK, J ;
ZEMON, S ;
LAMBERT, G .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :437-444
[8]  
PISTOL ME, 1986, 2ND INT C SUP MICR M
[9]   FACTORS INFLUENCING DOPING CONTROL AND ABRUPT METALLURGICAL TRANSITIONS DURING ATMOSPHERIC-PRESSURE MOVPE GROWTH OF ALGAAS AND GAAS [J].
ROBERTS, JS ;
MASON, NJ ;
ROBINSON, M .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :422-430
[10]   ELECTRICAL AND OPTICAL-PROPERTIES OF DEEP LEVELS IN MOVPE GROWN GAAS [J].
SAMUELSON, L ;
OMLING, P ;
TITZE, H ;
GRIMMEISS, HG .
JOURNAL OF CRYSTAL GROWTH, 1981, 55 (01) :164-172