SENSITIVITY AND CONTRAST OF SOME PROTON-BEAM RESISTS

被引：18

作者：

BRAULT, RG

MILLER, LJ

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1980年 / 20卷 / 16期

关键词：

D O I：

10.1002/pen.760201605

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：1064 / 1068

页数：5

共 15 条

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[8] ENERGY DEPOSITION FUNCTIONS IN ELECTRON RESIST FILMS ON SUBSTRATES [J].

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[10]

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