TOPOGRAPHY AND CORRELATION TO WEAR OF HYDROGENATED AMORPHOUS-CARBON COATINGS - AN ATOMIC FORCE MICROSCOPY STUDY

被引:5
作者
HEINZELMANN, H [1 ]
MEYER, E [1 ]
SCANDELLA, L [1 ]
GRUTTER, P [1 ]
JUNG, T [1 ]
HUG, H [1 ]
HIDBER, HR [1 ]
GUNTHERODT, HJ [1 ]
SCHMIDT, C [1 ]
机构
[1] DIGITAL EQUIPMENT INT,W-8950 KAUFBEUREN,GERMANY
关键词
D O I
10.1016/0043-1648(89)90099-9
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
引用
收藏
页码:109 / 117
页数:9
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