OXIDE-GROWTH ON SILICIDES IN OXYGEN PLASMA

被引：10

作者：

CLIMENT, A

ENARD, JP

LAVERNHE, B

PERRIERE, J

STRABONI, A

VUILLERMOZ, B

LEVY, D

机构：

[1] UNIV PARIS 07,ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75251 PARIS 05,FRANCE

[2] CTR NATL ETUD TELECOMMUN,CNS,F-38243 MEYLAN,FRANCE

来源：

APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90913-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：185 / 195

页数：11

共 7 条

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[7]

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