SILICON OXIDATION IN AN OXYGEN PLASMA EXCITED BY MICROWAVES

被引：150

作者：

LIGENZA, JR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1965年 / 36卷 / 09期

关键词：

D O I：

10.1063/1.1714565

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2703 / +

页数：1

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