EFFECT OF AN ELECTRIC FIELD ON SILICON OXIDATION

被引：189

作者：

JORGENSEN

机构：

来源：

关键词：

D O I：

10.1063/1.1733177

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：874 / &

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