MICRO-RBS ANALYSIS USING A TOROIDAL ELECTROSTATIC ANALYZER

被引：7

作者：

KINOMURA, A

ANDOH, H

TAKAI, M

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

[2] OSAKA UNIV,RCEM,TOYONAKA,OSAKA 560,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95537-F

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A toroidal electrostatic analyzer was Installed in a microbeam line for local backscattering analysis with high energy resolution and simultaneous detection of angular ion distributions. The secondary electron image of gold patterns on silicon could be obtained with a minimum spot size of 8 x 8 mum2. The energy resolution of the toroidal analyzer slightly decreased with the decrease in the spot size. Changes in probe position gave rise to energy shifts of leading edges in RBS spectra.

引用

页码：140 / 143

页数：4

共 7 条

[1]

Ehrlich D.J., 1989, LASER MICROFABRICATI

[2]

Grime G. W., 1984, BEAM OPTICS QUADRUPO

[3] MEDIUM ENERGY ION-SCATTERING USING A TOROIDAL ANALYZER COMBINED WITH A MICROBEAM LINE [J].