MEDIUM ENERGY ION-SCATTERING USING A TOROIDAL ANALYZER COMBINED WITH A MICROBEAM LINE

被引：17

作者：

KINOMURA, A

TAKAI, M

MATSUMOTO, K

NAMBA, S

AGAWA, Y

机构：

[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

[2] ULVAC JAPAN LTD,CHIGASAKI,KANAGAWA,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 64卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95536-Z

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A microbeam line with a toroidal electrostatic analyzer was constructed for medium energy ion scattering by a focused beam. Demagnification factors of the lens system were D(x) = 0.99 and D(y) = 2.1 for the present two-chamber configuration and D(x) = 2.4 and D(y) = 7.1 for the future single chamber configuration. For a 200 keV He+ beam, the energy resolution of the toroidal analyzer was dE/E = 4.7 x 10(-3), corresponding to a depth of 6.4 angstrom in a surface gold layer.

引用

页码：576 / 579

页数：4

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