A 500 KEV ION-BEAM ACCELERATOR FOR MICROBEAM FORMATION

被引：12

作者：

AGAWA, Y

UCHIYAMA, T

HOSHINO, A

TSUBOI, H

FUKUI, R

TAKAGI, K

YAMAKAWA, H

MATSUO, T

TAKAI, M

NAMBA, S

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

[2] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 45卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90895-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A 500 keV ion accelerator with a Disktron high-voltage generator has been developed for RBS analysis with microbeam and ion beam modification. An accelerating voltage stability of better than 4.5 × 10-4, with a long-term (∼1 h) current stability of better than 3%, was obtained for both proton and helium ions at 400 keV. The short-term (∼ ms) current stability, which is very important for RBS mapping measurements, was found to be better than 2 × 10-3. The X-ray dose rate around the accelerator was less than 0.03 mR/h at maximum with an acceleration of helium ions of 40 μA at an energy of 500 keV. © 1990.

引用

页码：540 / 542

页数：3

共 9 条

[1] 1 MV ROTATING-DISK TYPE HIGH-VOLTAGE GENERATOR FOR APPLICATION TO AN IMPLANTER [J].

ISOYA, A ;

MIYAKE, Y ;

TAKAGI, K ;

UCHIYAMA, T ;

YUI, K ;

KIKUCHI, R ;

KOMIYA, S ;

HAYASHI, C .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2) :250-257

[2]

ISOYA A, 1980, 3RD P S ACC SCI TECH, P251

[3] INTERFACE OBSERVATION USING MEDIUM ENERGY ION-SCATTERING WITH HIGH-ENERGY RESOLUTION [J].

KOSHIKAWA, T ;

KIKUCHI, R ;

TAKAGI, K ;

UCHIYAMA, T ;

MIHARA, Y ;

AGAWA, Y ;

MATSUURA, S ;

INUZUKA, E ;

SUZUKI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :623-627

[4] THE DEVELOPMENT OF A 400 KEV ION ACCELERATOR FOR SURFACE STUDY AND ATOMIC COLLISION EXPERIMENTS [J].

MIHARA, Y ;

UCHIYAMA, T ;

AGAWA, Y ;

FUKUI, R ;

KATAGAWA, T ;

TSUKAKOSHI, O ;

ROSTEK, P ;

TSUBOI, H ;

TAKAGI, K ;

YAMAKAWA, H ;

KIKUCHI, R ;

ISOYA, A ;

KOSHIKAWA, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :609-611

[5] ANGLE RESOLVED DETECTION OF CHARGED-PARTICLES WITH A NOVEL TYPE TOROIDAL ELECTROSTATIC ANALYZER [J].

SMEENK, RG ;

TROMP, RM ;

KERSTEN, HH ;

BOERBOOM, AJH ;

SARIS, FW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 195 (03) :581-586

[6] A MICROBEAM LINE FOR MEDIUM-ENERGY ION-BEAMS [J].

TAKAI, M ;

MATSUO, T ;

KINOMURA, A ;

NAMBA, S ;

INOUE, K ;

ISHIBASHI, K ;

KAWATA, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :553-556

[7] MICROBEAMLINE DESIGN FOR MEDIUM TO HIGH-ENERGY HELIUM ION-BEAMS [J].

TAKAI, M ;

MATSUO, T ;

NAMBA, S ;

INOUE, K ;

ISHIBASHI, K ;

KAWATA, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :260-263

[8] A NEW UHV SYSTEM FOR CHANNELING BLOCKING ANALYSIS OF SOLID-SURFACES AND INTERFACES [J].

TROMP, RM ;

KERSTEN, HH ;

GRANNEMAN, E ;

SARIS, FW ;

KOUDIJS, R ;

KILSDONK, WJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :155-166

[9] A 400 KEV ION ACCELERATOR FOR SURFACE STUDY [J].

UCHIYAMA, T ;

TAKAGI, K ;

KATAGAWA, T ;

MIHARA, Y ;

FUKUI, R ;

TSUKAKOSHI, O ;

KIKUCHI, R ;

ISOYA, A ;

KOMIYA, S ;

KOSHIKAWA, T ;

SUZUKI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :306-309

← 1 →