MICROBEAMLINE DESIGN FOR MEDIUM TO HIGH-ENERGY HELIUM ION-BEAMS

被引：12

作者：

TAKAI, M

MATSUO, T

NAMBA, S

INOUE, K

ISHIBASHI, K

KAWATA, Y

机构：

[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

[2] KOBE STEEL LTD,CTR ELECTR TECHNOL,KOBE,HYOGO 67302,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90182-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：260 / 263

页数：4

共 7 条

[1]

Grime G. W., 1984, BEAM OPTICS QUADRUPO, P34

[2] FOCUSING PROTONS AND LIGHT-IONS TO MICRON AND SUB-MICRON DIMENSIONS [J].

GRIME, GW ;

WATT, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) :227-234

[3] MICROBEAM LINE WITH 1.5 MEV HELIUM-IONS AND PROTONS AT OSAKA [J].

INOUE, K ;

TAKAI, M ;

MATSUNAGA, K ;

IZUMI, M ;

GAMO, K ;

NAMBA, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (04) :580-591

[4]

ISHIBASHI K, UNPUB

[5] ACTIVITIES FOR THE CONSTRUCTION OF A NEW HEIDELBERG PROTON MICROPROBE [J].

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) :265-270

[6] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM [J].

TAKAI, M ;

MATSUNAGA, K ;

INOUE, K ;

IZUMI, M ;

GAMO, K ;

SATO, M ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L550-L553

[7] FOCUSED MEV BEAM LINE FOR MICROANALYSIS AT OSAKA [J].

TAKAI, M ;

KINOMURA, A ;

INOUE, K ;

MATSUNAGA, K ;

IZUMI, M ;

GAMO, K ;

NAMBA, S ;

SATOU, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) :260-264

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