FOCUSED MEV BEAM LINE FOR MICROANALYSIS AT OSAKA

被引：22

作者：

TAKAI, M ^{[1
]}

KINOMURA, A ^{[1
]}

INOUE, K ^{[1
]}

MATSUNAGA, K ^{[1
]}

IZUMI, M ^{[1
]}

GAMO, K ^{[1
]}

NAMBA, S ^{[1
]}

SATOU, M ^{[1
]}

机构：

[1] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 30卷 / 03期

关键词：

D O I：

10.1016/0168-583X(88)90007-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：260 / 264

页数：5

共 12 条

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[10] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM [J].

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