200-KV MASS-SEPARATED FINE FOCUSED ION-BEAM APPARATUS

被引：13

作者：

SHIOKAWA, T

KIM, PH

TOYODA, K

NAMBA, S

GAMO, K

AIHARA, R

ANAZAWA, N

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

[2] JEOL LTD,TOKYO 196,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 07期

关键词：

D O I：

10.1143/JJAP.24.L566

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L566 / L568

页数：3

共 18 条

[1]

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[6]

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[7]

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[9] HIGH-RESOLUTION SPUTTERING USING A FOCUSED ION-BEAM [J].

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SELIGER, RL ;

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[10] BI-LEVEL STRUCTURES FOR FOCUSED ION-BEAM USING MASKLESS ION ETCHING [J].

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (03) :L172-L174

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