MICROBEAM LINE WITH 1.5 MEV HELIUM-IONS AND PROTONS AT OSAKA

被引:17
作者
INOUE, K [1 ]
TAKAI, M [1 ]
MATSUNAGA, K [1 ]
IZUMI, M [1 ]
GAMO, K [1 ]
NAMBA, S [1 ]
机构
[1] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN
关键词
D O I
10.1016/0168-583X(88)90135-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:580 / 591
页数:12
相关论文
共 19 条
[1]   SHUTTER-CONTROLLED MICROBEAM COMBINED WITH SCANNING SYSTEM FOR 2-DIMENSIONAL BACKSCATTERING IMAGES [J].
BAYERL, P ;
EICHINGER, P .
NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :663-664
[2]  
Chu W. K., 1978, BACKSCATTERING SPECT
[3]   PRODUCTION AND USE OF A NUCLEAR MICROPROBE OF IONS AT MEV ENERGIES [J].
COOKSON, JA .
NUCLEAR INSTRUMENTS & METHODS, 1979, 165 (03) :477-508
[4]   ION-BEAM ASSISTED DEPOSITION OF METAL ORGANIC FILMS USING FOCUSED ION-BEAMS [J].
GAMO, K ;
TAKAKURA, N ;
SAMOTO, N ;
SHIMIZU, R ;
NAMBA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (05) :L293-L295
[5]   REAL AND PARASITIC ABERRATIONS OF QUADRUPOLE PROBE-FORMING SYSTEMS [J].
GRIME, GW ;
WATT, F ;
BLOWER, GD ;
TAKACS, J ;
JAMIESON, DN .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01) :97-109
[6]  
HECK D, 1977, NUCL INSTR METH, V147, P423
[7]   THE HEIDELBERG PROTON MICRO-PROBE [J].
KNEIS, H ;
MARTIN, B ;
NOBILING, R ;
POVH, B ;
TRAXEL, K .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01) :79-83
[8]   PROTON AND NUCLEAR MICRO-PROBE DEVELOPMENTS [J].
LEGGE, GJF .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01) :243-253
[9]  
LEGGE GJF, 1973, NUCL INSTR METH, V106, P525
[10]   FABRICATION OF 80 NM-WIDE LINES IN FPM RESIST BY H+ BEAM EXPOSURE [J].
MORIWAKI, K ;
ARITOME, H ;
NAMBA, S ;
KARAPIPERIS, L .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (12) :L881-L884