TOMOGRAPHY OF MICROSTRUCTURES BY SCANNING MICRO-RBS PROBE

被引：22

作者：

KINOMURA, A

TAKAI, M

MATSUO, T

SATOU, M

NAMBA, S

CHAYAHARA, A

机构：

[1] OSAKA UNIV, EXTREME MAT RES CTR, TOYONAKA, OSAKA 560, JAPAN

[2] GOVT IND RES INST, IKEDA, OSAKA 563, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 07期

关键词：

D O I：

10.1143/JJAP.28.L1286

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1286 / L1289

页数：4

共 8 条

[1]

Chu W. K., 1978, BACKSCATTERING SPECT

[2] PRODUCTION AND USE OF A NUCLEAR MICROPROBE OF IONS AT MEV ENERGIES [J].

COOKSON, JA .

NUCLEAR INSTRUMENTS & METHODS, 1979, 165 (03) :477-508

[3] 3-DIMENSIONAL LITHIUM MICROANALYSIS BY THE LI-7(P,ALPHA) REACTION [J].

HECK, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) :486-490

[4] MICROBEAM LINE WITH 1.5 MEV HELIUM-IONS AND PROTONS AT OSAKA [J].

INOUE, K ;

TAKAI, M ;

MATSUNAGA, K ;

IZUMI, M ;

GAMO, K ;

NAMBA, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (04) :580-591

[5] RBS ANALYSIS OF BEAM-PROCESSED MICROAREA BY FOCUSED MEV ION-BEAM [J].

KINOMURA, A ;

TAKAI, M ;

MATSUO, T ;

UJIIE, S ;

NAMBA, S ;

SATOU, M ;

KIUCHI, M ;

FUJII, K ;

SHIOKAWA, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :40-42

[6] MICROPROBE USING FOCUSED 1.5 MEV HELIUM ION AND PROTON-BEAMS [J].

KINOMURA, A ;

TAKAI, M ;

INOUE, K ;

MATSUNAGA, K ;

IZUMI, M ;

MATSUO, T ;

GAMO, K ;

NAMBA, S ;

SATOU, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4) :862-866

[7] SINGLE CRYSTALLINE GERMANIUM ISLAND ON INSULATOR BY ZONE-MELTING RECRYSTALLIZATION [J].

TAKAI, M ;

TANIGAWA, T ;

GAMO, K ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (10) :L624-L626

[8] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM [J].

TAKAI, M ;

MATSUNAGA, K ;

INOUE, K ;

IZUMI, M ;

GAMO, K ;

SATO, M ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L550-L553

← 1 →