RBS ANALYSIS OF BEAM-PROCESSED MICROAREA BY FOCUSED MEV ION-BEAM

被引：6

作者：

KINOMURA, A

TAKAI, M

MATSUO, T

UJIIE, S

NAMBA, S

SATOU, M

KIUCHI, M

FUJII, K

SHIOKAWA, T

机构：

[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

[2] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN

[3] INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90738-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：40 / 42

页数：3

共 9 条

[1]

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[5] DEVELOPMENTS ON THE MELBOURNE SCANNING PROTON MICRO-PROBE [J].

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[7] 200-KV MASS-SEPARATED FINE FOCUSED ION-BEAM APPARATUS [J].

SHIOKAWA, T ;

KIM, PH ;

TOYODA, K ;

NAMBA, S ;

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AIHARA, R ;

ANAZAWA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (07) :L566-L568

[8] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM [J].

TAKAI, M ;

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[9]

WATT F, 1987, PRINCIPLES APPLICATI

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