MAGNETIC ANALYSIS OF QUADRUPOLE LENS FOR MEV ION MICROPROBE

被引：8

作者：

INOUE, K

TAKAI, M

ISHIBASHI, K

KAWATA, Y

NAMBA, S

机构：

[1] OSAKA UNIV, FAC ENGN SCI, TOYONAKA, OSAKA 560, JAPAN

[2] OSAKA UNIV, EXTREME MAT RES CTR, TOYONAKA, OSAKA 560, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 07期

关键词：

D O I：

10.1143/JJAP.28.L1307

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1307 / L1309

页数：3

共 7 条

[1]

Grime G. W., 1984, BEAM OPTICS QUADRUPO

[2] MICROBEAM LINE WITH 1.5 MEV HELIUM-IONS AND PROTONS AT OSAKA [J].

INOUE, K ;

TAKAI, M ;

MATSUNAGA, K ;

IZUMI, M ;

GAMO, K ;

NAMBA, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (04) :580-591

[3]

PARZEN G, 1976, BNL50536 BROOKH NAT

[4] MICROBEAMLINE DESIGN FOR MEDIUM TO HIGH-ENERGY HELIUM ION-BEAMS [J].

TAKAI, M ;

MATSUO, T ;

NAMBA, S ;

INOUE, K ;

ISHIBASHI, K ;

KAWATA, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :260-263

[5] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM [J].

TAKAI, M ;

MATSUNAGA, K ;

INOUE, K ;

IZUMI, M ;

GAMO, K ;

SATO, M ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05) :L550-L553

[6] FOCUSED MEV BEAM LINE FOR MICROANALYSIS AT OSAKA [J].

TAKAI, M ;

KINOMURA, A ;

INOUE, K ;

MATSUNAGA, K ;

IZUMI, M ;

GAMO, K ;

NAMBA, S ;

SATOU, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (03) :260-264

[7]

WATT F, 1987, PRINCIPLES APPLICATI

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