ION-SOURCE WITH PLASMA CATHODE

被引：22

作者：

YABE, E

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1987年 / 58卷 / 01期

关键词：

D O I：

10.1063/1.1139559

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1 / 5

页数：5

共 10 条

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[8] PLASMA FILAMENT ION-SOURCE [J].

YABE, E ;

TONEGAWA, A ;

SATOH, D ;

TAKAYAMA, K ;

FUKUI, R ;

TAKAGI, K ;

OKAMOTO, K ;

KOMIYA, S .

VACUUM, 1986, 36 (1-3) :43-45

[9] AN ION-SOURCE WITH PLASMA GENERATOR [J].

YABE, E ;

TAKESHIRO, S ;

SUNAKO, K ;

TAKAYAMA, K ;

FUKUI, R ;

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OKAMOTO, K ;

KOMIYA, S .

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[10]

YABE E, 1983, 1983 P INT ION ENG C, V1, P403

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