NEW MOS-TYPE GLUCOSE SENSOR USING SPUTTERED LAF3 FILM

被引:4
作者
KATSUBE, T [1 ]
KUBOTA, T [1 ]
SHIMIZU, M [1 ]
MATAYOSHI, N [1 ]
MIURA, N [1 ]
YAMAZOE, N [1 ]
机构
[1] KYUSHU UNIV,GRAD SCH ENGN SCI,DEPT MAT SCI & TECHNOL,KASUGA,FUKUOKA 816,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1991年 / 30卷 / 5A期
关键词
MOS-TYPE SENSOR; GLUCOSE SENSOR; LAF3; FILM; MICRO ENZYME SENSOR; H2O2; SENSOR; SOLID ELECTROLYTE;
D O I
10.1143/JJAP.30.L871
中图分类号
O59 [应用物理学];
学科分类号
摘要
A MOS-type micro glucose sensor using a sputtered LaF3 (solid electrolyte) film was newly developed. The sensor, having a structure of GOD (glucose oxidase) immobilized film/Pt/LaF3/SiO2/Si/Al multiple layers, needs no external reference electrode. A stable response was obtained in the glucose concentration range from 2 x 10(-4) to 2 x 10(-2) M in a phosphate buffer solution of (pH 6.9), with a 90% response time of ca. 1 min. This MOS-type sensor was found to also respond to H2O2 in the buffer.
引用
收藏
页码:L871 / L874
页数:4
相关论文
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