SYNTHESIS AND PROPERTIES OF ULTRAFINE AIN POWDER BY RF PLASMA

被引：61

作者：

BABA, K

SHOHATA, N

YONEZAWA, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 23期

关键词：

D O I：

10.1063/1.101111

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2309 / 2311

页数：3

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