GROWTH ANISOTROPY AND REACTIONS MECHANISMS IN METAL ORGANICS VAPOR-PHASE EPITAXY OF GAAS

被引:5
作者
GIBART, P
TROMSONCARLI, A
MONTEIL, Y
RUDRA, A
机构
[1] CNRS,PHYS SOLIDE LAB,F-92195 MEUDON,FRANCE
[2] UNIV LYON 1,PHYSICOCHIM MINERALE LAB,F-69622 VILLEURBANNE,FRANCE
[3] ECOLE POLYTECH FED LAUSANNE,INST MICROELECTR,CH-1045 LAUSANNE,SWITZERLAND
来源
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
关键词
D O I
10.1051/jphyscol:1989562
中图分类号
学科分类号
摘要
引用
收藏
页码:529 / 538
页数:10
相关论文
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