SURFACE-LAYER OXIDATION OF COPPER-IMPLANTED ALUMINUM NITRIDE

被引：6

作者：

YAMADA, M ^{[1
]}

IWAKI, M ^{[1
]}

机构：

[1] INST PHYS & CHEM RES,RIKEN,WAKO,SAITAMA 35101,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1988年 / 7卷 / 11期

关键词：

D O I：

10.1007/BF00722346

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1233 / 1234

页数：2

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