REAL-TIME DISPLACEMENT MEASUREMENT USING SYNCHRONOUS DETECTION IN A SINUSOIDAL PHASE MODULATING INTERFEROMETER

被引:28
作者
SUZUKI, T
SASAKI, O
TAKAYAMA, S
MARUYAMA, T
机构
关键词
INTERFEROMETRY; LASER DIODES; SYNCHRONOUS DETECTION; FEEDBACK CONTROL; PHASE COMPENSATION;
D O I
10.1117/12.130252
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A real-time displacement measurement system using a sinusoidal phase modulating interferometer is proposed and demonstrated. The system utilizes the frequency components of the interference signal to detect the desired phase or the displacement in real time. The real-time phase detector is constructed with simple electronic circuits. The system also has a feedback loop to eliminate external disturbance. It is easy to measure the relatively large displacement that exceeds a half wavelength of the light because the compensation circuit is incorporated into the system to obtain continuous phase outside the region from 0 to 2pi.
引用
收藏
页码:1033 / 1037
页数:5
相关论文
共 18 条
[1]   MEASUREMENT OF SURFACE-TOPOGRAPHY OF MAGNETIC TAPES BY MIRAU INTERFEROMETRY [J].
BHUSHAN, B ;
WYANT, JC ;
KOLIOPOULOS, CL .
APPLIED OPTICS, 1985, 24 (10) :1489-1497
[2]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[3]   PHASE-STEPPING INTERFEROMETRY WITH LASER-DIODES - EFFECT OF CHANGES IN LASER POWER WITH OUTPUT WAVELENGTH [J].
HARIHARAN, P .
APPLIED OPTICS, 1989, 28 (01) :27-29
[4]   DIGITAL PHASE-MEASURING INTERFEROMETRY WITH A TUNABLE LASER DIODE [J].
ISHII, Y ;
CHEN, J ;
MURATA, K .
OPTICS LETTERS, 1987, 12 (04) :233-235
[5]   REAL-TIME DIGITAL HETERODYNE INTERFEROMETRY - SYSTEM [J].
MASSIE, NA .
APPLIED OPTICS, 1980, 19 (01) :154-160
[6]   HETERODYNE PROFILING INSTRUMENT FOR THE ANGSTROM REGION [J].
PANTZER, D ;
POLITCH, J ;
EK, L .
APPLIED OPTICS, 1986, 25 (22) :4168-4172
[7]   SINUSOIDAL PHASE MODULATING FIZEAU INTERFEROMETER [J].
SASAKI, O ;
OKAMURA, T ;
NAKAMURA, T .
APPLIED OPTICS, 1990, 29 (04) :512-515
[8]   SINUSOIDAL PHASE MODULATING INTERFEROMETER USING OPTICAL FIBERS FOR DISPLACEMENT MEASUREMENT [J].
SASAKI, O ;
TAKAHASHI, K .
APPLIED OPTICS, 1988, 27 (19) :4139-4142
[9]   SINUSOIDAL PHASE MODULATING INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT [J].
SASAKI, O ;
OKAZAKI, H .
APPLIED OPTICS, 1986, 25 (18) :3137-3140
[10]   SINUSOIDAL PHASE MODULATING LASER DIODE INTERFEROMETER WITH A FEEDBACK-CONTROL SYSTEM TO ELIMINATE EXTERNAL DISTURBANCE [J].
SASAKI, O ;
TAKAHASHI, K ;
SUZUKI, T .
OPTICAL ENGINEERING, 1990, 29 (12) :1511-1515