REAL-TIME DISPLACEMENT MEASUREMENT USING SYNCHRONOUS DETECTION IN A SINUSOIDAL PHASE MODULATING INTERFEROMETER

被引:28
作者
SUZUKI, T
SASAKI, O
TAKAYAMA, S
MARUYAMA, T
机构
关键词
INTERFEROMETRY; LASER DIODES; SYNCHRONOUS DETECTION; FEEDBACK CONTROL; PHASE COMPENSATION;
D O I
10.1117/12.130252
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A real-time displacement measurement system using a sinusoidal phase modulating interferometer is proposed and demonstrated. The system utilizes the frequency components of the interference signal to detect the desired phase or the displacement in real time. The real-time phase detector is constructed with simple electronic circuits. The system also has a feedback loop to eliminate external disturbance. It is easy to measure the relatively large displacement that exceeds a half wavelength of the light because the compensation circuit is incorporated into the system to obtain continuous phase outside the region from 0 to 2pi.
引用
收藏
页码:1033 / 1037
页数:5
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