共 28 条
[1]
BERGHAUS B, 1937, Patent No. 510933
[2]
Bunshah R.F, 1974, U.S. Patent, Patent No. [3,791,852, 3791852]
[3]
PLASMA ASSISTED PHYSICAL VAPOR-DEPOSITION PROCESSES - A REVIEW
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1985, 3 (03)
:553-560
[4]
ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1972, 9 (06)
:1385-&
[5]
BUNSHAH RF, 1982, DEPOSITION TECHNOLOG, P1
[6]
CHOW D, 1992, LTRST1669 NAT RES CO
[7]
FUNDAMENTAL-STUDY OF TIN FILMS DEPOSITED BY ION-BEAM MIXING
[J].
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING,
1989, 115
:349-353
[8]
ADHESION OF TITANIUM NITRIDE COATINGS ON HIGH-SPEED STEELS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (02)
:308-315
[9]
Lowden P, 1990, CAN AERONAUT SPACE J, V36, P24
[10]
MACK M, 1990, SURFACE TECHNOLOGY