FUNDAMENTAL-STUDY OF TIN FILMS DEPOSITED BY ION-BEAM MIXING

被引：22

作者：

HAYASHI, K ^{[1
]}

SUGIYAMA, K ^{[1
]}

FUKUTANI, K ^{[1
]}

KITTAKA, H ^{[1
]}

机构：

[1] NIPPON STEEL CORP LTD,KIMITSU WORKS,KIMITSU,CHIBA 29911,JAPAN

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷

关键词：

D O I：

10.1016/0921-5093(89)90702-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：349 / 353

页数：5

共 8 条

[1]

ANDO Y, IN PRESS NUCL INSTRU

[2] MICROSTRUCTURES OF TIN AND TI2N DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].

JACOBSON, BE ;

NIMMAGADDA, R ;

BUNSHAH, RF .

THIN SOLID FILMS, 1979, 63 (02) :333-339

[3] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[4] TITANIUM NITRIDE CRYSTAL-GROWTH WITH PREFERRED ORIENTATION BY DYNAMIC MIXING METHOD [J].

KIUCHI, M ;

TOMITA, M ;

FUJII, K ;

SATOU, M ;

SHIMIZU, R .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (06) :L938-L940

[5] PROPERTIES OF AIN FILMS DEPOSITED ON N-IMPLANTED AL [J].

OHIRA, S ;

HIEI, K ;

IWAKI, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 32 (1-4) :66-70

[6] SCRATCH ADHESION TESTING OF HARD COATINGS [J].

PERRY, AJ .

THIN SOLID FILMS, 1983, 107 (02) :167-180

[7] ADHESION TESTING BY THE SCRATCH TEST METHOD - THE INFLUENCE OF INTRINSIC AND EXTRINSIC PARAMETERS ON THE CRITICAL LOAD [J].

STEINMANN, PA ;

TARDY, Y ;

HINTERMANN, HE .

THIN SOLID FILMS, 1987, 154 (1-2) :333-349

[8]

Takano I., 1988, Journal of the Vacuum Society of Japan, V31, P529, DOI 10.3131/jvsj.31.529

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