ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE

被引：68

作者：

KANT, RA

SARTWELL, BD

SINGER, IL

VARDIMAN, RG

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90494-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：915 / 919

页数：5

共 7 条

[1] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION [J].

CUOMO, JJ ;

HARPER, JME ;

GUARNIERI, CR ;

YEE, DS ;

ATTANASIO, LJ ;

ANGILELLO, J ;

WU, CT ;

HAMMOND, RH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :349-354

[2]

DAVIS LE, 1976, HDB AUGER ELECTRON S

[3] THE MICROSTRUCTURE OF TYPE-304 STAINLESS-STEEL IMPLANTED WITH TITANIUM AND CARBON AND ITS RELATION TO FRICTION AND WEAR TESTS [J].

FOLLSTAEDT, DM ;

POPE, LE ;

KNAPP, JA ;

PICRAUX, ST ;

YOST, FG .

THIN SOLID FILMS, 1983, 107 (03) :259-267

[4] STRUCTURE AND PROPERTIES OF DEPOSITS GROWN BY ION-BEAM-ACTIVATED VACUUM DEPOSITION TECHNIQUES [J].

PRANEVICIUS, L .

THIN SOLID FILMS, 1979, 63 (01) :77-85

[5] CARBURIZATION OF STEEL SURFACES DURING IMPLANTATION OF TI IONS AT HIGH FLUENCES [J].

SINGER, IL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :419-422

[6]

SOOD DK, 1985, NUCL INSTRUM METH B, V7-8, P893, DOI 10.1016/0168-583X(85)90490-2

[7]

WEISSMANTEL C, 1979, THIN SOLID FILMS, V58, P101, DOI 10.1016/0040-6090(79)90217-7

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